Removing Ambiguities in Surface Roughness Measurement
نویسندگان
چکیده
منابع مشابه
Absolute measurement of surface roughness.
In an interferometer which uses a reference surface, the measured surface heights correspond to the difference between the test and reference surfaces. To accurately determine the rms roughness of supersmooth surfaces, the effects of the reference surface roughness need to be removed. One technique for doing this involves averaging a number of uncorrelated measurements of a mirror to generate a...
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ژورنال
عنوان ژورنال: Optica Acta: International Journal of Optics
سال: 1982
ISSN: 0030-3909
DOI: 10.1080/713820876